Materials Sciences and Applications
Vol.4 No.12(2013), Paper ID 41128, 6
pages
DOI:10.4236/msa.2013.412102
Effect of Zn Sputtering Rate on the Morphological and Optical Properties of ZnO Films
Michel Chaves, Erica Pereira da Silva, Steven Frederick Durrant, Nilson Cristino da Cruz, Paulo Noronha Lisboa-Filho, José Roberto Ribeiro Bortoleto
Technological Plasmas Laboratory, S?o Paulo State University-UNESP, Sorocaba, Brazil
Technological Plasmas Laboratory, S?o Paulo State University-UNESP, Sorocaba, Brazil
Technological Plasmas Laboratory, S?o Paulo State University-UNESP, Sorocaba, Brazil
Technological Plasmas Laboratory, S?o Paulo State University-UNESP, Sorocaba, Brazil
Group of Advanced Materials, S?o Paulo State University-UNESP, Bauru, Brazil
Technological Plasmas Laboratory, S?o Paulo State University-UNESP, Sorocaba, Brazil
Copyright © 2013 Michel Chaves, Erica Pereira da Silva, Steven Frederick Durrant, Nilson Cristino da Cruz, Paulo Noronha Lisboa-Filho, José Roberto Ribeiro Bortoleto et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
M. Chaves, E. Silva, S. Durrant, N. Cruz, P. Lisboa-Filho and J. Bortoleto, "Effect of Zn Sputtering Rate on the Morphological and Optical Properties of ZnO Films,"
Materials Sciences and Applications, Vol. 4 No. 12, 2013, pp. 802-807. doi:
10.4236/msa.2013.412102.