Materials Sciences and Applications

Vol.4 No.12(2013), Paper ID 41128, 6 pages

DOI:10.4236/msa.2013.412102

 

Effect of Zn Sputtering Rate on the Morphological and Optical Properties of ZnO Films

 

Michel Chaves, Erica Pereira da Silva, Steven Frederick Durrant, Nilson Cristino da Cruz, Paulo Noronha Lisboa-Filho, José Roberto Ribeiro Bortoleto

 

Technological Plasmas Laboratory, S?o Paulo State University-UNESP, Sorocaba, Brazil
Technological Plasmas Laboratory, S?o Paulo State University-UNESP, Sorocaba, Brazil
Technological Plasmas Laboratory, S?o Paulo State University-UNESP, Sorocaba, Brazil
Technological Plasmas Laboratory, S?o Paulo State University-UNESP, Sorocaba, Brazil
Group of Advanced Materials, S?o Paulo State University-UNESP, Bauru, Brazil
Technological Plasmas Laboratory, S?o Paulo State University-UNESP, Sorocaba, Brazil

 

Copyright © 2013 Michel Chaves, Erica Pereira da Silva, Steven Frederick Durrant, Nilson Cristino da Cruz, Paulo Noronha Lisboa-Filho, José Roberto Ribeiro Bortoleto et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


M. Chaves, E. Silva, S. Durrant, N. Cruz, P. Lisboa-Filho and J. Bortoleto, "Effect of Zn Sputtering Rate on the Morphological and Optical Properties of ZnO Films," Materials Sciences and Applications, Vol. 4 No. 12, 2013, pp. 802-807. doi: 10.4236/msa.2013.412102.

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