Materials Sciences and Applications

Vol.2 No.1(2011), Paper ID 3645, 8 pages

DOI:10.4236/msa.2011.21002

 

Forming Stages of Polycrystalline TiN Films Depending on the Nitrogen Concentration in Mixed Gas

 

Anna L. Kameneva

 

 

Copyright © 2011 Anna L. Kameneva et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


A. Kameneva, "Forming Stages of Polycrystalline TiN Films Depending on the Nitrogen Concentration in Mixed Gas," Materials Sciences and Applications, Vol. 2 No. 1, 2011, pp. 6-13. doi: 10.4236/msa.2011.21002.

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