Optics and Photonics Journal

Vol.3 No.2BB(2013), Paper ID 34989, 5 pages

DOI:10.4236/opj.2013.32B053

 

Maskless Microscopic Lithography through Shaping Ultraviolet Laser with Digital Micro-mirror Device

 

Xiang-Yu Ding, Yu-Xuan Ren, Rong-De Lu

 

Department of Physics, University of Science and Technology of China, Hefei, China
2Institute of Biochemistry and Cell Biology, Shanghai Institutes for Biological Sciences, CAS, Shanghai, China 3National Center for Protein Sciences (Shanghai), Shanghai Institutes for Biological Sciences, CAS, Shanghai, China
Department of Physics, University of Science and Technology of China, Hefei, China

 

Copyright © 2013 Xiang-Yu Ding, Yu-Xuan Ren, Rong-De Lu et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


X. Ding, Y. Ren and R. Lu, "Maskless Microscopic Lithography through Shaping Ultraviolet Laser with Digital Micro-mirror Device," Optics and Photonics Journal, Vol. 3 No. 2B, 2013, pp. 227-231. doi: 10.4236/opj.2013.32B053.

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