Crystal Structure Theory and Applications

Vol.1 No.3(2012), Paper ID 26154, 5 pages

DOI:10.4236/csta.2012.13011

 

Amorphous-Nanocrystalline Transition in Silicon Thin Films Obtained by Argon Diluted Silane PECVD

 

Rachid Amrani, Frederic Pichot, Larbi Chahed, Yvan Cuminal

 

Université Montpellier II, Place Eugène Bataillon Montpellier, Montpellier, France
Université Montpellier II, Place Eugène Bataillon Montpellier, Montpellier, France
Département de Physique, Université d’Oran ES-Sénia, Oran, Algérie
Université Montpellier II, Place Eugène Bataillon Montpellier, Montpellier, France

 

Copyright © 2012 Rachid Amrani, Frederic Pichot, Larbi Chahed, Yvan Cuminal et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


R. Amrani, F. Pichot, L. Chahed and Y. Cuminal, "Amorphous-Nanocrystalline Transition in Silicon Thin Films Obtained by Argon Diluted Silane PECVD," Crystal Structure Theory and Applications, Vol. 1 No. 3, 2012, pp. 57-61. doi: 10.4236/csta.2012.13011.

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