Journal of Modern Physics

Vol.3 No.10A(2012), Paper ID 23798, 13 pages

DOI:10.4236/jmp.2012.330200

 

A Supersonic Plasma Jet Source for Controlled and Efficient Thin Film Deposition

 

Ilaria Biganzoli, Francesco Fumagalli, Fabio Di Fonzo, Ruggero Barni, Claudia Riccardi

 

Dipartimento di Fisica Occhialini, Università degli Studi di Milano-Bicocca, Milano, Italy
Dipartimento di Fisica Occhialini, Università degli Studi di Milano-Bicocca, Milano, Italy
Center for Nano Science and Technology, Italian Institute of Technology, Milano, Italy
Dipartimento di Fisica Occhialini, Università degli Studi di Milano-Bicocca, Milano, Italy
Dipartimento di Fisica Occhialini, Università degli Studi di Milano-Bicocca, Milano, Italy

 

Copyright © 2012 Ilaria Biganzoli, Francesco Fumagalli, Fabio Di Fonzo, Ruggero Barni, Claudia Riccardi et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


I. Biganzoli, F. Fumagalli, F. Fonzo, R. Barni and C. Riccardi, "A Supersonic Plasma Jet Source for Controlled and Efficient Thin Film Deposition," Journal of Modern Physics, Vol. 3 No. 10A, 2012, pp. 1626-1638. doi: 10.4236/jmp.2012.330200.

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