Journal of Surface Engineered Materials and Advanced Technology

Vol.2 No.2(2012), Paper ID 18810, 5 pages

DOI:10.4236/jsemat.2012.22018

 

Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets

 

Julien Kovac, Heinz-Rolf Stock, Hans-Werner Zoch

 

Oberflaechentechnik, Stiftung Institut für Werkstofftechnik (IWT), Bremen, Germany.
Oberflaechentechnik, Stiftung Institut für Werkstofftechnik (IWT), Bremen, Germany.
Oberflaechentechnik, Stiftung Institut für Werkstofftechnik (IWT), Bremen, Germany.

 

Copyright © 2012 Julien Kovac, Heinz-Rolf Stock, Hans-Werner Zoch et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


J. Kovac, H. Stock and H. Zoch, "Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets," Journal of Surface Engineered Materials and Advanced Technology, Vol. 2 No. 2, 2012, pp. 115-119. doi: 10.4236/jsemat.2012.22018.

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