Vol. No.(), Paper ID 14030, 4 pages

DOI:

 

Effect of Target-to-Substrate Distance and Sputtering Angle on Property of Cu and Fe Films

 

Shan-shan Zhang, Hai Wang, Hong-wei Jiang

 

Department of Physics, Capital Normal University, Beijing 100048, China
Department of Physics, Capital Normal University, Beijing 100048, China
Department of Physics, Capital Normal University, Beijing 100048, China

 

Copyright © Shan-shan Zhang, Hai Wang, Hong-wei Jiang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

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