Transfer of Machined Patterns on an Aluminum Plate to Pyrex Glass Using Reactive Ion Etching SF<sub>6</sub> Plasma without Masks

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ISSN Print: 2161-4881
ISSN Online: 2161-489X
www.scirp.org/journal/jsemat
E-mail: jsemat@scirp.org

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"Transfer of Machined Patterns on an Aluminum Plate to Pyrex Glass Using Reactive Ion Etching SF₆ Plasma without Masks"
written by Carlos M. Ortiz-Lima, Fernando J. Quiñones-Novelo, Alberto Jaramillo-Núñez, Jorge Castro-Ramos,
published by Journal of Surface Engineered Materials and Advanced Technology, Vol.4 No.5, 2014

has been cited by the following article(s):

[1]	Método para la construcción de placas de fase en vidrio Pyrex utilizando RIE sin mascarillas
	2015

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