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Stable Adaptive Fuzzy Control with Hysteresis Observer for Three-Axis Micro/Nano Motion Stages

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DOI: 10.4236/ica.2012.34043    3,163 Downloads   4,374 Views  


This paper considers the analytical dynamics with simplified Dahl hysteresis model for a three-axis piezoactuated micro/nano flexure stage. An adaptive controller with nonlinear dynamic hysteresis observer is proposed using Lyapunov stability theory. In the controller, a fuzzy function approximator with parameters update law is included to compensate for the identification inaccuracy, model uncertainty, and flexure coupling effects. Simulation results are used to demonstrate the control performance.

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The authors declare no conflicts of interest.

Cite this paper

L. Lin, B. Chang and B. Liaw, "Stable Adaptive Fuzzy Control with Hysteresis Observer for Three-Axis Micro/Nano Motion Stages," Intelligent Control and Automation, Vol. 3 No. 4, 2012, pp. 390-403. doi: 10.4236/ica.2012.34043.


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