TITLE:
Enhancing Mechanical Stability of Nano-Structured Anti-Reflection Coatings
AUTHORS:
Behnam Kheyraddini Mousavi, Tito Busani, Mani Hossein Zadeh, Steven Roy Julien Brueck
KEYWORDS:
Maximum Transmission, Mechanical Stability, Reflection, Laser, Nano-Structure
JOURNAL NAME:
Journal of Applied Mathematics and Physics,
Vol.8 No.2,
February
6,
2020
ABSTRACT: Periodic Nanostructured anti-reflection coatings (NALs) are a promising option for enhancing transmission of coherent light without inducing scattering. We’ve found that reducing the height of NALs below a critical value to enhance mechanical stability can highly reduce the transmission efficiency. Here, using Rigorous Couples Wave Analysis (RCWA), we find the minimum height for over 99% transmission and effect of height on transmission bandwidth. Then, during a one-step plasma etching, two samples with different heights have been generated and their efficiency is evaluated using RCWA.