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Buzynin, A.N., Luk’yanov, A.E., Osiko, V.V. and Voronkov, V.V. (2002) Non-Equilibrium Impurity Redistribution in Si. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 186, 366- 370.
https://doi.org/10.1016/S0168-583X(01)00882-5

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