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Rogstrom, L., Johansson, M.P., Ghafoor, N., Hultman, L. and Odén, M. (2012) Influence of Chemical Composition and Deposition Conditions on Microstructure Evolution during Annealing of Arc Evaporated ZrAlN Thin Films. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 30, 031504. https://doi.org/10.1116/1.3698592

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