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Kim, S.K., Le, V.V., Vinh, P.V. and Lee, J.W. (2008) Effect of Cathode Arc Current and Bias Voltage on the Mechanical Properties of CrAlSiN Thin Films. Surface and Coatings Technology, 202, 5400-5404.
http://dx.doi.org/10.1016/j.surfcoat.2008.06.019
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