Hah, D., Huang, S.T.Y., Tsai, J.C., Toshiyoshi, H. and Wu, M.C. (2004) Low-Voltage, Large-Scan Angle MEMS Analog Micromirror Arrays with Hidden Vertical Comb-Drive Actuators. Journal of Microelectromechanical Systems, 13, 279-289.
https://doi.org/10.1109/JMEMS.2004.825314

has been cited by the following article:

• TITLE: Design and Optimization of Comb Drive Accelerator for High Frequency Oscillation

  AUTHORS: Zichen Zhang

  KEYWORDS: Comb-Drive Micro-Structure, COMSOL Multiphysics, Optimization, Electric Responses

  JOURNAL NAME: Modern Mechanical Engineering, Vol.8 No.1, January 17, 2018

  ABSTRACT: Comb-drive devises have been widely applied in many fields. However, the application of high frequency sensor, such as rocket chamber, still remains problems. In this work, a finite element code was used for the design, optimization and visualization of a comb drive accelerator. In the simulation results, the post-optimization design has high performance in high frequency oscillation operating environment. The optimization is based on the ideal eigenfrequency and Nelder-Mead method. The 3-D working conditions are realized by testing and comparing the time and frequency domain of pre-optimized and optimized design whose frequency ranges from 2000 Hz to 5000 Hz. Finally, the electric potential and capacitance in comb drive are visualized, which shows the better electric signals and displacements.