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Yamanaka, J., Sawano, K., Nakagawa, K., Suzuki, K., Ozawa, Y., Koh, S., Hattori, T. and Shiraki, Y. (2004) Mater. Sci. Semicond. Process., 7, 389. https://doi.org/10.1016/j.mssp.2004.09.008

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