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Chen, H.R., Chen, Y.C., Chang, T.C., Chang, K.C., Tsai, T.M., Chu, T.J., Shih, C.C., Chuang, N.C. and Wang, K.Y. (2014) Surface Scattering Mechanisms of Tantalum Nitride Thin Film Resistor. Nanoscale Research Letters, 9, 177.
https://doi.org/10.1186/1556-276X-9-177

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