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Pastor, D., Cuscó, R., Artús, L., Díaz, G.G., Fernández, S. and Calleja, E. (2005) Effect of the Implantation Temperature on Lattice Damage of Be+-Implanted GaN. Semiconductor Science and Technology, 20, 374-377.
https://doi.org/10.1088/0268-1242/20/5/009

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