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Epstein, A.H., Senturia, S.D., Anathasuresh, G., Ayon, A., Breuer, K., Chen, K-S, Ehrich, F.E., Gauba, G., Ghodssi, R., Groshenry, C., Jacobson, S., Lang, J.H., Lin, C.-C., Mehra, A., Mur Miranda, J.O., Nagle, S., Orr, D.J., Piekos, E., Schmidt, M.A., Shirley, G., Spearing, S.M., Tan, C.S., Tzeng, Y.-S. and Waitz, I.A. (1997) Power MEMS and Microengines. Proceedings of IEEE Transducers '97 Conference, Chicago, June 1997.

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