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Habuka, H., Furukawa, K., Kanai, T. and Kato, T. (2012) Density and Behavior of Etch Pits on C-Face 4H-SiC Surface Produced by ClF3 Gas. Material Science Forum, 717-720, 379-382.
http://dx.doi.org/10.4028/www.scientific.net/MSF.717-720.379

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