International Conference on Engineering and Business Management (EBM 2010 PAPERBACK)

Chengdu,China,China,3.24-3.26,2010

ISBN: 978-1-935068-05-1 Scientific Research Publishing, USA

Paperback 6066pp Pub. Date: March 2010

Category: Engineering

Price: $280

Title: Advanced Process Control of Mix-Product Semiconductor Processes
Source: International Conference on Engineering and Business Management (EBM 2010 PAPERBACK) (pp 2032-2035)
Author(s): Juhn-Horng CHEN, Department of Mechanical Engineering, Chung Hua University, Hsinchu, Chinese Taipei
Horng-Shing CHIOU, Department of Electrical Engineering, Technology and Science Institute of Northern Taiwan, Taipei, Chinese Taipei
Wei-Tai WENG, Department of Industrial Engineering and Management, Ming Chi University of Technology, Taipei, Chinese Taipei
Shun-An TSAI, Department of Mechanical Engineering, Chung Hua University, Hsinchu, Chinese Taipei
Abstract: Abstract: This paper developed an advanced control technique for mix-product semiconductor processes with measurement delay. The conventional run-to-run process control for single-type-product processes was improved to that for mix-product processes through individually estimating the disturbances induced by tools and products. Simulation results show that, for mix-product processes with measurement delay, the performance of the proposed controller is superior to that of the independent D-EWMA controller.
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