A Hybrid Structure of Dual Stators and a Pneumatic Spring for Resonance Control in an Air Mount

Hyung-Tae Kim, Cheol-Ho Kim, Sung-Bok Kang, Seok-Jun Moon, Gyu-Seop Lee

Shock and Vibration Team, KIMM, DaeJeon, South Korea;.
Smart System Research Group, KITECH, CheonAn, South Korea.
Smart System Research Group, KITECH, CheonAn, South Korea;.
Structure Dynamic Design Group, RMS Technology, CheonAn, South Korea..

DOI: 10.4236/jemaa.2013.53019                

Abstract

An active device using electromagnetic forces was constructed and examined for the purpose of minimizing the resonance in air mounts of clean rooms. The air mounts are vulnerable to low-frequency resonance due to heavy weight and low stiffness. A hybrid structure of the active device, composed of pneumatic and electromagnetic parts, was developed and tested. The pneumatic parts in the device support heavy weights under the air mounts, and the electromagnetic parts reduce the resonance. The electromagnetic parts are composed of dual stators and an armature, which surround the pneumatic parts. The resonance can decrease when electromagnetic forces are generated in the gaps between the stators and the armature. Four active devices were installed under a 3-ton surface plate for a vibration test apparatus. The vibration was detected by eddy-current sensors. Discrete P Control logic was based on displacement, and embedded in a C6713 DSP. The results from impact tests show that the peak magnitude in the resonance frequency can be reduced to –10 dB.

Keywords

Low Frequency Resonance; Active Vibration Control; Pneumatic Spring; Air Mount

Conflicts of Interest

The authors declare no conflicts of interest.

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