AMPC> Vol.2 No.3, September 2012

Phase Transformations in PZT Thin Films Prepared by Polymeric Chemical Method

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ABSTRACT

Lead zirconate titanate Pb(Zr0.50Ti0.50)O3 (PZT) thin films were deposited by a polymeric chemical method on Pt(111)/ Ti/SiO2/Si substrates to understand the mechanisms of phase transformations in these films. PZT films pyrolyzed at temperatures higher than 350℃ present a coexistence of pyrochlore and perovskite phases, while only perovskite phase is present in films pyrolyzed at temperatures lower than 300℃. For films where the pyrochlore and perovskite phase coexists the amount of pyrochlore phase decreases from top surface to the bottom film-electrode interface and the PZT structure near top surface are Ti-rich compositions while near the bottom film-electrode interface the compositions are Zr-rich. For pyrochlore-free PZT thin film, a small (100) orientation tendency near the film-electrode interface was observed.

Cite this paper

E. Lima and E. Araújo, "Phase Transformations in PZT Thin Films Prepared by Polymeric Chemical Method," Advances in Materials Physics and Chemistry, Vol. 2 No. 3, 2012, pp. 178-184. doi: 10.4236/ampc.2012.23027.

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