[1]
|
Z. Liu, Y. Zhang, S. W. Kok, B. P. Ng and Y. C. Soh, “Near-Field Ellipsometry for Thin Film Characterization,” Optics Express, Vol. 18, No. 4, 2010, pp. 3298-3310. doi:10.1364/OE.18.003298
|
[2]
|
D. Roy, “Optical Characterization of Multi-layer Thin Films Using the Surface Plasmon Resonance Method: A Six Phase Model Based on the Kretschmann Formalism,” Optics Communications, Vol. 200, No. 1-6, 2001, pp. 119-130.
|
[3]
|
R. M. Azzam and N. M. Bashara, “Ellipsometry and Polarized Light,” North-Holland, Amsterdam, 1977.
|
[4]
|
G. H. Tompkins, “Handbook of Ellipsometry,” William Andrew, Heidelberg, 2005. doi:10.1007/3-540-27488-X
|
[5]
|
B. Sun, Y. Chen, P. Zhou, C. H. Xu, Y. F. Kong, Y. X. Zheng and L. Y. Chen, “Ellipsometric Study of the Optical Properties of Silicon-Based Si:SiO2 Composite Thin Films under Different Annealing Temperatures,” The Korean Physical Society, Vol. 49, No. 95, 2006, pp. 2184-2187.
|
[6]
|
T. W. Oates, L. Ryves and M. M. Bilek, “Dielectric Functions of a Growing Silver Film Determined Using Dynamic in Situ Spectroscopic Ellipsometry,” Optics Express, Vol. 16, No. 4, 2008, pp. 2302-2314.
doi:10.1364/OE.16.002302
|
[7]
|
D. E. Aspnes, “Fourier Transform Detection System for Rotating Analyzer Ellipsometers,” Optics Communications, Vol. 8, No. 3, 1973, pp. 222-225.
doi:10.1016/0030-4018(73)90132-6
|
[8]
|
D. E. Aspnes, “High Precision Scanning Ellipsometer,” Applied Optics, Vol. 4, No. 1, 1975, pp. 220-228.
|
[9]
|
A.R. Zaghloul and R.M. Azzam, “Single-Element Rotating Polarizer Ellipsometer: PSI Meter,” Surface Science, Vol. 96, No. 1-3, 1980, pp. 168-173.
doi:10.1016/0039-6028(80)90301-5
|
[10]
|
L. Vina, C. Umbatch, M. Cardona and L. Vodopyanov, “Ellipsometric Studies of Electric Interband Transitions in CdxHg1–xTe,” Physical Review B, Vol. 29, No. 12, 1984, pp. 6752-6760. doi:10.1103/PhysRevB.29.6752
|
[11]
|
L. Y. Chen and D. W. Lynch, “Scanning Ellipsometer by Rotating Polarizer and Analyzer,” Applied Optics, Vo. 26, No. 24, 1987, pp. 5221-5228.
|
[12]
|
L. Y. Chen, X. W. Feng, Y. Su, H. Z. Ma and Y. H. Qian, “Improved Rotating Analyzer-Polarizer of Scanning Ellipsometer,” Thin Solid Films, Vol. 234, No. 1-2, 1993, pp. 385-389.
|
[13]
|
L. Y. Chen, X. W. Feng, Y. Su, H. Z. Ma and Y. H. Qian, “Design of a Scanning Ellipsometer by Synchronous Rotation of the Polarizer and Analyzer,” Applied Optics, Vol. 33, No. 7, 1994, pp. 1299-1305.
doi:10.1364/AO.33.001299
|
[14]
|
T. M. El-Agez, A. A. El Tayyan and S. A. Taya, “Rotating Polarizer-Analyzer Scanning Ellipsometer,” Thin Solid Films, Vol. 518, No. 19, 2010, pp. 5610-5614.
doi:10.1016/j.tsf.2010.04.067
|
[15]
|
T. M. El-Agez and S. A. Taya, “A Fourier Ellipsometer by Rotating Polarizer and Analyzer at a Speed Ratio 1:1,” Journal of Sensors, Vol. 2010, 2010, Article ID: 706829.
doi:10.1155/2010/706829
|
[16]
|
T. M. El-Agez, S. A. Taya and A. A. El Tayayn, “A Novel Scanning Ellipsometer by Rotating Polarizer and Analyzer at a Speed Ratio 1:3,” International Journal of Optomechatronics, Vol. 5, No. 1, 2011, pp. 51-67.
doi:10.1080/15599612.2011.559685
|
[17]
|
E. D. Palik, “Handbook of Optical Constants of Solids,” Academic Press, San Diego, 1985.
|
[18]
|
S. Samuel, “Ellipsometric Analyses for an Absorbing Substrate with or without an Intermediate Surface Layer,” Surface Science, Vol. 56, 1976, pp. 97-108.
doi:10.1016/0039-6028(76)90437-4
|
[19]
|
D. J. Schroeder, “Astronomical Optics,” Academic Press, San Diego, 1999.
|