Analysis for Pull-In Voltage of a Multilayered Micro-Bridge Driven by Electrostatic Force

Y. LIU, G.C. WANG, H.Y. YANG

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DOI: 10.4236/eng.2010.21007                

Abstract

A trial solution for bending deflection of a multilayered micro-bridge subject to a voltage induced load is presented. The relation between the applied voltage and the displacements of the micro-bridge in the pull-in state is analyzed by energy method. Furthermore, two analytical expressions about normalized displacement and pull-in voltage are carried out. It’s proved that the value of normalized displacement is not influenced by residual stress if axial and shear deformation is ignored. Finally, the theoretical results are compared with that of FEM, and they show good agreement.

Keywords

MEMS, Electrostatic Actuation, Multilayered Micro-Bridge, Trial Solution, Energy Method, Pull-In Voltage

Conflicts of Interest

The authors declare no conflicts of interest.

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