JST> Vol.1 No.4, December 2011

 

Copyright © 2011 Daesil Kang, Wonkyu Moon et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article

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D. Kang and W. Moon, "Improvement of High Dynamic Range Capacitive Displacement Sensor by a Globalm Planarization," Journal of Sensor Technology, Vol. 1 No. 4, 2011, pp. 99-107. doi: 10.4236/jst.2011.14014.

 

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