Fraunhofer Institute for Manufacturing Technology and Advanced Materials (IFAM), Wiener Straße 12, Bremen, Germany
Fraunhofer Institute for Manufacturing Technology and Advanced Materials (IFAM), Wiener Straße 12, Bremen, Germany
University of Bremen, Faculty of Production Engineering, Badgasteiner Straße 1, Bremen, Germany
Copyright © 2018 Gustavo Simiema de Freitas Barbosa, Klaus Vissing, Bernd Mayer et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
Simiema de Freitas Barbosa, G. , Vissing, K. and Mayer, B. (2018) Introduction of a New Baffle-Plate Concept to Control the Gas Flow Behavior in a Large Volume PECVD Chamber.
Open Journal of Fluid Dynamics,
8, 141-160. doi:
10.4236/ojfd.2018.82011.