Open Access Library Journal

Vol.4 No.1(2017), Paper ID 73320, 12 pages

DOI:10.4236/oalib.1103269

 

Study the Addition of Lab-Made Gas Mixing Unit with Varying of Inter-Electrode Distances on the Characterization of DC Magnetron Sputtering System

 

Bahaa T. Chiad, Firas J. Kadhim, Ahmed A. Anber

 

Department of Physics, College of Science, University of Baghdad, Baghdad, Iraq
Department of Physics, College of Science, University of Baghdad, Baghdad, Iraq
Department of Physics, College of Science, University of Wasit, Wasit, Iraq

 

Copyright © 2017 Bahaa T. Chiad, Firas J. Kadhim, Ahmed A. Anber et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


Chiad, B. , Kadhim, F. and Anber, A. (2017) Study the Addition of Lab-Made Gas Mixing Unit with Varying of Inter-Electrode Distances on the Characterization of DC Magnetron Sputtering System. Open Access Library Journal, 4, 1-12. doi: 10.4236/oalib.1103269.

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