Journal of Modern Physics

Vol.7 No.15(2016), Paper ID 71865, 10 pages

DOI:10.4236/jmp.2016.715178

 

Characteristics of GaN Thin Films Using Magnetron Sputtering System

 

Hasina F. Huq, Rocio Y. Garza, Roman Garcia-Perez

 

Electrical Engineering, University of Texas Pan American, Edinburg, USA
Electrical Engineering, University of Texas Pan American, Edinburg, USA
Electrical Engineering, University of Texas Pan American, Edinburg, USA

 

Copyright © 2016 Hasina F. Huq, Rocio Y. Garza, Roman Garcia-Perez et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


Huq, H. , Garza, R. and Garcia-Perez, R. (2016) Characteristics of GaN Thin Films Using Magnetron Sputtering System. Journal of Modern Physics, 7, 2028-2037. doi: 10.4236/jmp.2016.715178.

Copyright © 2024 by authors and Scientific Research Publishing Inc.

Creative Commons License

This work and the related PDF file are licensed under a Creative Commons Attribution 4.0 International License.