Journal of Applied Mathematics and Physics

Vol.4 No.9(2016), Paper ID 71005, 26 pages

DOI:10.4236/jamp.2016.49185

 

Analysis of Langmuir Probe Characteristics for Measurement of Plasma Parameters in RF Discharge Plasmas

 

Kohgi Kato, Satoru Iizuka

 

Department of Electrical Engineering, Graduate School of Engineering, Tohoku University, Sendai, Japan
Department of Electrical Engineering, Graduate School of Engineering, Tohoku University, Sendai, Japan

 

Copyright © 2016 Kohgi Kato, Satoru Iizuka et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


Kato, K. and Iizuka, S. (2016) Analysis of Langmuir Probe Characteristics for Measurement of Plasma Parameters in RF Discharge Plasmas. Journal of Applied Mathematics and Physics, 4, 1811-1836. doi: 10.4236/jamp.2016.49185.

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