Department of Chemical and Energy Engineering, Yokohama National University, Yokohama, Japan
Department of Chemical and Energy Engineering, Yokohama National University, Yokohama, Japan
Department of Chemical and Energy Engineering, Yokohama National University, Yokohama, Japan
Department of Chemical and Energy Engineering, Yokohama National University, Yokohama, Japan
Shizuoka Factory, Pre-Tech Co., Ltd., Yaizu, Japan
Copyright © 2016 Shogo Okuyama, Kento Miyazaki, Nobutaka Ono, Hitoshi Habuka, Akihiro Goto et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
Okuyama, S. , Miyazaki, K. , Ono, N. , Habuka, H. and Goto, A. (2016) Slim Water Injection Nozzle for Silicon Wafer Wet Cleaning Bath.
Advances in Chemical Engineering and Science,
6, 345-354. doi:
10.4236/aces.2016.64035.