Journal of Electronics Cooling and Thermal Control
Vol.6 No.2(2016), Paper ID 67814, 11
pages
DOI:10.4236/jectc.2016.62009
A Generic MEMS Fabrication Process Based on a Thermal Budget Approach
Carlos Ramón Báez Álvarez, Álvarez, Mónico Linares Aranda, Alfonso Torres Jácome, Mario Moreno Moreno, Joel Molina Reyes, Carlos Zúñiga Islas, Wilfrido Calleja Arriaga
INAOE, LI-MEMS, Electronics Department, Puebla, México
INAOE, LI-MEMS, Electronics Department, Puebla, México
INAOE, LI-MEMS, Electronics Department, Puebla, México
INAOE, LI-MEMS, Electronics Department, Puebla, México
INAOE, LI-MEMS, Electronics Department, Puebla, México
INAOE, LI-MEMS, Electronics Department, Puebla, México
INAOE, LI-MEMS, Electronics Department, Puebla, México
Copyright © 2016 Carlos Ramón Báez Álvarez, Álvarez, Mónico Linares Aranda, Alfonso Torres Jácome, Mario Moreno Moreno, Joel Molina Reyes, Carlos Zúñiga Islas, Wilfrido Calleja Arriaga et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
Álvarez, C. , Aranda, Á. , Jácome, A. , Moreno, M. , Reyes, J. , Islas, C. and Arriaga, W. (2016) A Generic MEMS Fabrication Process Based on a Thermal Budget Approach.
Journal of Electronics Cooling and Thermal Control,
6, 97-107. doi:
10.4236/jectc.2016.62009.