Materials Sciences and Applications

Vol.2 No.8(2011), Paper ID 6701, 6 pages

DOI:10.4236/msa.2011.28134

 

Investigation of Electrical Transport in PECVD Grown a-SiCx:H Thin Film

 

Orhan Özdemir, Kutsal Bozkurt, Kubilay Kutlu

 

Yildiz Technical University, Physics Department, Esenler/?STANBUL

 

Copyright © 2011 Orhan Özdemir, Kutsal Bozkurt, Kubilay Kutlu et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article

Özdemir, O. , Bozkurt, K. and Kutlu, K. (2011) Investigation of Electrical Transport in PECVD Grown a-SiCx:H Thin Film. Materials Sciences and Applications, 2, 993-999. doi: 10.4236/msa.2011.28134.
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