Department of Chemical and Energy Engineering, Yokohama National University, Yokohama, Japan
Department of Chemical and Energy Engineering, Yokohama National University, Yokohama, Japan
National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan
FUPET, Tsukuba, Japan
Copyright © 2015 Hitomi Matsuda, Hitoshi Habuka, Yuuki Ishida, Toshiyuki Ohno et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
Matsuda, H. , Habuka, H. , Ishida, Y. and Ohno, T. (2015) Metal Fluorides Produced Using Chlorine Trifluoride Gas.
Journal of Surface Engineered Materials and Advanced Technology,
5, 228-236. doi:
10.4236/jsemat.2015.54024.