Journal of Surface Engineered Materials and Advanced Technology
Vol.5 No.1(2015), Paper ID 52943, 14
pages
DOI:10.4236/jsemat.2015.51004
Surface Roughness Modification of Free Standing Single Crystal Silicon Microstructures Using KrF Excimer Laser Treatment for Mechanical Performance Improvement
Mohamed Elwi Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky
Department of Micro Engineering, Kyoto University, Kyoto, Japan
Department of Micro Engineering, Kyoto University, Kyoto, Japan
Department of Micro Engineering, Kyoto University, Kyoto, Japan
Zewail City of Science and Technology, Cairo, Egypt
Copyright © 2015 Mohamed Elwi Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
Mitwally, M. , Tsuchiya, T. , Tabata, O. and Sedky, S. (2015) Surface Roughness Modification of Free Standing Single Crystal Silicon Microstructures Using KrF Excimer Laser Treatment for Mechanical Performance Improvement.
Journal of Surface Engineered Materials and Advanced Technology,
5, 28-41. doi:
10.4236/jsemat.2015.51004.