Advances in Chemical Engineering and Science

Vol.4 No.4(2014), Paper ID 50864, 10 pages

DOI:10.4236/aces.2014.44054

 

The Lattice Kinetic Monte Carlo Simulation of Boron Diffusion in SiGe

 

Yu-Wei Huang, Ren-Shiou Ke, Shyi-Long Lee

 

Department of Chemistry and Biochemistry, University of National Chung-Cheng, Chia-Yi
Department of Chemistry and Biochemistry, University of National Chung-Cheng, Chia-Yi
Department of Chemistry and Biochemistry, University of National Chung-Cheng, Chia-Yi

 

Copyright © 2014 Yu-Wei Huang, Ren-Shiou Ke, Shyi-Long Lee et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


Huang, Y. , Ke, R. and Lee, S. (2014) The Lattice Kinetic Monte Carlo Simulation of Boron Diffusion in SiGe. Advances in Chemical Engineering and Science, 4, 529-538. doi: 10.4236/aces.2014.44054.

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