Journal of Modern Physics

Vol.2 No.5(2011), Paper ID 4883, 6 pages

DOI:10.4236/jmp.2011.25049

 

Pulsed Supermagnetron Plasma CVD of a-CNx:H Electron-Transport Films for Au/a-CNx:H/p-Si Photovoltaic Cells

 

Haruhisa Kinoshita, Hiroyuki Suzuki

 

 

Copyright © 2011 Haruhisa Kinoshita, Hiroyuki Suzuki et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


H. Kinoshita and H. Suzuki, "Pulsed Supermagnetron Plasma CVD of a-CNx:H Electron-Transport Films for Au/a-CNx:H/p-Si Photovoltaic Cells," Journal of Modern Physics, Vol. 2 No. 5, 2011, pp. 398-403. doi: 10.4236/jmp.2011.25049.

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