JMP> Vol.5 No.5, March 2014

1Research Institute for Science and Engineering, Waseda University, Tokyo, Japan 2HiLASE Project, Institute of Physics AS, Prague, Czech Republic

 

Copyright © 2014 Akira Endo et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article

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Endo, A. (2014) Extendibility Evaluation of Industrial EUV Source Technologies for kW Average Power and 6.x nm Wavelength Operation. Journal of Modern Physics, 5, 285-295. doi: 10.4236/jmp.2014.55039.

 

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