Materials Sciences and Applications
Vol.5 No.3(2014), Paper ID 43823, 9
pages
DOI:10.4236/msa.2014.53018
Deposition of Titanium Layer on Steel Substrate Using PECVD Method: A Parametric Study
Haman Hedaiatmofidi, Alireza Sabour Rouh Aghdam, Shahrokh Ahangarani, Mansour Bozorg, Mahboube Azadi, Maryam Valiei
Surface Engineering Laboratory, Materials Engineering Department, Faculty of Engineering, Tarbiat Modares University, Tehran, Iran
Surface Engineering Laboratory, Materials Engineering Department, Faculty of Engineering, Tarbiat Modares University, Tehran, Iran
Advanced Materials & Renewable Energies Department, Iranian Research Organization for Science and Technology, Tehran, Iran
Surface Engineering Laboratory, Materials Engineering Department, Faculty of Engineering, Tarbiat Modares University, Tehran, Iran
Surface Engineering Laboratory, Materials Engineering Department, Faculty of Engineering, Tarbiat Modares University, Tehran, Iran
Material Science and Technology, Azad University, Tehran, Iran
Copyright © 2014 Haman Hedaiatmofidi, Alireza Sabour Rouh Aghdam, Shahrokh Ahangarani, Mansour Bozorg, Mahboube Azadi, Maryam Valiei et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
Hedaiatmofidi, H. , Aghdam, A. , Ahangarani, S. , Bozorg, M. , Azadi, M. and Valiei, M. (2014) Deposition of Titanium Layer on Steel Substrate Using PECVD Method: A Parametric Study.
Materials Sciences and Applications,
5, 140-148. doi:
10.4236/msa.2014.53018.