Journal of Sensor Technology

Vol.3 No.3(2013), Paper ID 36858, 6 pages

DOI:10.4236/jst.2013.33010

 

An Integrated ISFET pH Microsensor on a CMOS Standard Process

 

Francisco López-Huerta, Rosa María Woo-Garcia, Miguel Lara-Castro, Johan Jair Estrada-López, Agustín Leobardo Herrera-May

 

Research Center for Micro and Nanotechnology, University of Veracruz, Veracruz, Mexico
Faculty of Electronics Sciences, Meritorious Autonomous University of Puebla, Puebla, Mexico
Research Center for Micro and Nanotechnology, University of Veracruz, Veracruz, Mexico
Faculty of Mathematics, Autonomous University of Yucatán, Mérida, Mexico
Research Center for Micro and Nanotechnology, University of Veracruz, Veracruz, Mexico

 

Copyright © 2013 Francisco López-Huerta, Rosa María Woo-Garcia, Miguel Lara-Castro, Johan Jair Estrada-López, Agustín Leobardo Herrera-May et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


F. López-Huerta, R. Woo-Garcia, M. Lara-Castro, J. Estrada-López and A. Herrera-May, "An Integrated ISFET pH Microsensor on a CMOS Standard Process," Journal of Sensor Technology, Vol. 3 No. 3, 2013, pp. 57-62. doi: 10.4236/jst.2013.33010.

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