ENG> Vol.2 No.10, October 2010

 

Copyright © 2010 Norizan Mohamad, Pio Iovenitti, Thurai Vinay et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

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Mohamad, N. , Iovenitti, P. and Vinay, T. (2010) Modelling and Optimisation of a Spring-Supported Diaphragm Capacitive MEMS Microphone. Engineering, 2, 762-770. doi: 10.4236/eng.2010.210098.

 

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