Department of Electrical and Electronic Engineering, Graduate School of Engineering,Shizuoka University, Hamamatsu, Japan
Department of Electrical and Electronic Engineering, Graduate School of Engineering, Shizuoka University, Hamamatsu, Japan
Department of Electrical and Electronic Engineering, Graduate School of Engineering, Shizuoka University, Hamamatsu, Japan
Copyright © 2013 Haruhisa Kinoshita, Syunsuke Yagi, Motoki Sakurai et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
H. Kinoshita, S. Yagi and M. Sakurai, "Deposition of a-CN
x:H Films Using Uniform Supermagnetron Plasma under a Stationary Magnet Field,"
Journal of Modern Physics, Vol. 4 No. 5, 2013, pp. 587-590. doi:
10.4236/jmp.2013.45083.