Department of Electrical Engineering, Graduate School of Engineering, Tohoku University, Sendai, Japan.
Department of Electrical Engineering, Graduate School of Engineering, Tohoku University, Sendai, Japan.
Copyright © 2012 Junichi Emi, Satoru Iizuka et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
J. Emi and S. Iizuka, "Diamond Particles Deposited among Nickel/Copper Particles in Energy Controlled CH
4/H
2 RF Discharge Plasmas,"
Journal of Surface Engineered Materials and Advanced Technology, Vol. 2 No. 3, 2012, pp. 158-162. doi:
10.4236/jsemat.2012.23025.