Oberflaechentechnik, Stiftung Institut für Werkstofftechnik (IWT), Bremen, Germany.
Oberflaechentechnik, Stiftung Institut für Werkstofftechnik (IWT), Bremen, Germany.
Oberflaechentechnik, Stiftung Institut für Werkstofftechnik (IWT), Bremen, Germany.
Copyright © 2012 Julien Kovac, Heinz-Rolf Stock, Hans-Werner Zoch et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
J. Kovac, H. Stock and H. Zoch, "Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets,"
Journal of Surface Engineered Materials and Advanced Technology, Vol. 2 No. 2, 2012, pp. 115-119. doi:
10.4236/jsemat.2012.22018.