On Leave from Institut für Strukturphysik, Technische Universit?t Dresden, Dresden, Germany
Triebenberg Laboratory, Institut für Strukturphysik, Technische Universit?t Dresden, Dresden, Germany
Institut für Strukturphysik, Technische Universit?t Dresden, Dresden, Germany.
Copyright © 2012 André Belger, Marianne Reibold, Peter Paufler et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
A. Belger, M. Reibold and P. Paufler, "Modulus and Hardness Change of Silicon and Sapphire Substrates by TiC/VC Multilayer Coatings,"
Materials Sciences and Applications, Vol. 3 No. 4, 2012, pp. 185-194. doi:
10.4236/msa.2012.34029.