Vol. No.(), Paper ID 14024, 5 pages

DOI:

 

Effects of Process Parameters on Field Emission Characteristics of AlN Thin Films Prepared by Pulsed Laser Deposition

 

Song-ling Li, Ru-zhi Wang, Wei Zhao, Zhi-wei Song, Bo Wang, Hui Yan

 

College of Materials Science and Engineering, Beijing University of Technology, Beijing, China
College of Materials Science and Engineering, Beijing University of Technology, Beijing, China
College of Materials Science and Engineering, Beijing University of Technology, Beijing, China
College of Materials Science and Engineering, Beijing University of Technology, Beijing, China
College of Materials Science and Engineering, Beijing University of Technology, Beijing, China
College of Materials Science and Engineering, Beijing University of Technology, Beijing, China

 

Copyright © Song-ling Li, Ru-zhi Wang, Wei Zhao, Zhi-wei Song, Bo Wang, Hui Yan et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

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