Natural Science

Vol.1 No.3(2009), Paper ID 1005, 5 pages

DOI:10.4236/ns.2009.13022

 

Fabrication of two-dimensional periodic TiO2 pillar arrays by multi-beam laser interference lithography

 

Hiroyo Segawa, Hiroaki Misawa

 

 

Copyright © 2009 Hiroyo Segawa, Hiroaki Misawa et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

 

How to Cite this Article


Segawa, H. and Misawa, H. (2009) Fabrication of two-dimensional periodic TiO2 pillar arrays by multi-beam laser interference lithography. Natural Science, 1, 176-180. doi: 10.4236/ns.2009.13022.

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