Mechanical Properties of Composite SiNx/DLC Films Prepared by Filtered Cathodic Arc of Graphite Incorporated with RF Sputtering of Silicon Nitride

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ISSN Print: 2153-117X
ISSN Online: 2153-1188
www.scirp.org/journal/msa
E-mail: msa@scirp.org

"Mechanical Properties of Composite SiNx/DLC Films Prepared by Filtered Cathodic Arc of Graphite Incorporated with RF Sputtering of Silicon Nitride"
written by Phuwanai Bunnak, Yongping Gong, Supanee Limsuwan, Artorn Pokaipisit, Pichet Limsuwan,
published by Materials Sciences and Applications, Vol.4 No.9, 2013

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