has been cited by the following article(s):
[1]
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Computer simulation of diffraction focusing in proximity lithography
SECOND INTERNATIONAL CONFERENCE ON MATERIAL SCIENCE, SMART STRUCTURES AND APPLICATIONS: ICMSS-2019,
2019
DOI:10.1063/1.5140164
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[2]
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Study of wide-spectrum and high-resolution diffraction optical elements by stacks of binary phase gratings
Applied Optics,
2018
DOI:10.1364/AO.57.009958
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[3]
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Development and Implementation of Methods and Means for Achieving a Uniform Functional Coating Thickness
Russian Metallurgy (Metally),
2017
DOI:10.1134/S0036029517130237
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[4]
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Analysis of Distributing Thin-Film Coating Thickness When Using the Magnetron Sputtering Systems with Planetary Movement of Substrate
Science and Education of the Bauman MSTU,
2014
DOI:10.7463/1114.0733662
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