S. Thompson, et al., “A 90 nm Logic Technology Featuring 50 nm Strained Silicon Channel Transistors, 7 Layers of Cu Interconnects, Low k ILD, and 1 um2 SRAM Cell,” IEEE International Electron Devices Meeting, IEDM Technical Digest, San Francisco, December 2002, pp. 61-64.

has been cited by the following article:

• TITLE: Intervalley Scattering of Electrons in n-Si at T = 77 ÷ 450 K

  AUTHORS: Valerii Ermakov, Volodymyr Kolomoets, Leonid Panasyuk, Baja Orasgulyev

  KEYWORDS: Silicon; f-Transitions; g-Transitions; Tensoresistivity Effect; Uniaxial Strain

  JOURNAL NAME: World Journal of Condensed Matter Physics, Vol.3 No.1, February 27, 2013

  ABSTRACT: The change in electron mobility of n-Si with increasing the temperature which may be due to the inclusion of gLOphonon energy of 720 K, is presented. Under orientation of the uniaxial pressure X//[110]//J, g-transitions are attached in the directions [100] and [010]. The f-transitions are not completely removed from valleys located in the plane (100). In this case, there is no change in the slope of the dependence logρ vs. logT for the temperature range 77 to 450 K. So, no appreciable contribution of g-transitions to intervalley scattering occurs, while the observed is the decisive role of f-transitions to intervalley scattering. The results of measuring of the tensoresistivity effect for n-Si crystals under X//[001]//J are presented at these temperatures too.