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Proceedings of the 7th National Conference on Functional Materials and Applications (FMA 2010 E-BOOK)

Changsha,China,10.16-10.18,2010

ISBN: 978-1-935068-41-9 Scientific Research Publishing, USA

E-Book 2313pp Pub. Date: October 2010

Category: Chemistry & Materials Science

Price: $360

Title: Tetrahedral Amorphous Carbon Films as a Frequency- Increased Interlayer of a Film-Shaped SAW Device
Source: Proceedings of the 7th National Conference on Functional Materials and Applications (FMA 2010 E-BOOK) (pp 157-161)
Author(s): Jia-qi Zhu, Center for Composite Materials, Harbin Institute of Technology, Harbin, P.R. China
Sai Wang, Center for Composite Materials, Harbin Institute of Technology, Harbin, P.R. China
Jie-cai Han, Center for Composite Materials, Harbin Institute of Technology, Harbin, P.R. China
Pei Lei, Center for Composite Materials, Harbin Institute of Technology, Harbin, P.R. China
Abstract: In order to increase central frequency and intensify the capability of supporting high-power of a film-shaped surface acoustic wave device, Tetrahedral amorphous carbon (ta-C) films deposited using filtered cathodic vacuum arc technology have been applied to the interlayer of surface acoustic wave devices with a ZnO/Si configuration. By means of performing the numerical calculation of the acoustic propagation equations for a multilayered configuration of IDT/ZnO/ta-C/Si, it has been shown that the propagation velocity of SAW was faster and the amplification turned mild with the growing thickness of ta-C films. The frequency responses were characterized by a network analyzer. The mechanical properties of ta-C films were measured using a nanoindenter and the microstructure was analyzed using Raman and XPS spectroscopy. It has been shown that the ta-C interlayer between piezoelectric film and Si substrate can strikingly increase the phase velocity of the surface acoustic wave.
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